TOFLAS-3000

  • TOFLAS®-3000, an atomic spanning surface analysis equipment, applies the measurement principle of ion scattering spectroscopy (CAICISS) and uses atomic beams rather than ions in the incident probe. Element analysis and structural analysis are possible immediately during metal, semiconductor, insulator sample surface or thin film growth.

SPECS

    ○원자산란 스팩트럼의 시간변화                         ○대전(帶電)에 의한 스팩트럼의 시간변화  sub2_Cont_img21.gif             sub2_Cont_img22.gif           ○성장모드 평가                  ○극성판별                        ○자기장내 측정가능 sub2_Cont_img23.gifsub2_Cont_img24.gifsub2_Cont_img25.gif