EUV Systems
- Compact Differentially Pumped Rotary Feedthrough is sealed at the side, which keeps the structure more compact, which is suitable for application with restricted dimensions. Meanwhile, it still meet the requirements of UHV applications. The feedthrough could be used for the applications including sample surface analysis (XPS, AES or SIMS), ion/neutral/atom scattering experiments, etc.
EUV Systems
- Differentially Pumped Rotary Feedthrough allows two flanges to rotate concentricly, which can be used as a modular component for constructing UHV multi-axis manipulators. It provides primary rotation for other components and achieve 360° continuous rotation. The feedthrough could be used for the applications including sample surface analysis (XPS, AES or SIMS), ion/neutral/atom scattering experiments, etc.
