Full-scale XYZ Stage(crossed roller bearing)
SPECS
Product Overview
The Full-Size XYZ stage with crossed roller bearing is of precision and operability and can provide X,Y and Z movement . The X/Y direction adopts crossed roller bearing and ball screw structure, which make the XYZ stage strong and compact in structure. Meanwhile, the Z direction adopts the combination structure of plain shaft and ball screw.
It is designed as a module with a wide range of optional configurations. Please contact for more information. Specification ● Working Pressure：10-11mbar~1 bar ● Bakeable to 120℃ ● Welded Bellows Seal with SS 316 ● Clear Bore up to 102mm ● Top mounting flange: CF flange, clear hole ● Bottom mounting flange: CF flange, tapped hole ● X/Y driver: Step motor with 10μm + handwheel ● Z driver: Step motor with 10μm ● minimum flange to flange(compressed) distance is 308mm
It is designed as a module with a wide range of optional configurations. Please contact for more information. Specification ● Working Pressure：10-11mbar~1 bar ● Bakeable to 120℃ ● Welded Bellows Seal with SS 316 ● Clear Bore up to 102mm ● Top mounting flange: CF flange, clear hole ● Bottom mounting flange: CF flange, tapped hole ● X/Y driver: Step motor with 10μm + handwheel ● Z driver: Step motor with 10μm ● minimum flange to flange(compressed) distance is 308mm
| A Flange OD | B Flange OD | XY Movement | Z Movement | ||
| mm | inch | mm | inch | mm | |
| 152 | 6 | 203 | 8 | ±12.5 | Up to 650 |