Product Overview

Medium XYZ stage, which is of precision and operability, provide X,Y and Z movement . X/Y direction adopts crossed roller bearing and ball screw structure, which make the stage strong and compact in structure. Meanwhile the Z direction adopts the combination structure of plain shaft and ball screw.
It is designed as a module with a wide range of optional configurations. Please contact for more information.

Specification

●  Working Pressure：10^-11mbar~1 bar

●  Bakeable to 120℃

●  Welded Bellows Seal with SS 316

●  Clear Bore up to 65mm

●  Top mounting flange: CF flange, clear hole or tapped hole

●  Bottom mounting flange: CF flange, tapped hole

●  X/Y driver: Step motor with 10μm or micrometer with10μm

●  Z driver: Step motor with 10μm + handwheel

●  minimum flange to flange(compressed) distance is 298.5mm