Coil Trap

  • POWDER ZERO – POWDER TRAP
  • RE100 [Renewable Electricity 100%]
  • NO PCW, NO ELECTRIC
  • Volume : 70L ~ 115L
  • FILTER TYPE : COIL FILTER

SPECS

 
TYPE MODEL VOLUME SIZE FLANGE
COIL TU-65LMJ TU-95LMJ 70 LITER 115 LITER ∅400xH1013 ∅485xH1064 NW40, NW50
 
MATERIAL WEIGHT PROCESS SET-UP PLACE CAPTURED AMOUNT
SUS304 100 KG 130 KG CVD, ETCH VACUUM LINE EXHAUST LINE MAX 50KG MAX 70KG
 
GAS UTILITY
PH3 PCW