Compact XYZ Stage
SPECS
Product Overview
Compact XYZ stage, with a compact structure, can provide precise motion and manipulation of samples inside UHV environments. The X/Y direction is controlled by micrometers, while the Z direction is driven by lead screw, which makes the operation more stable. Welded stainless steel bellows is used to allow the CF35 moving flange to travel within a limited range. There are optional bottom mounting flanges, NW35CF or NW63CF flanges.
Specification
● Working Pressure：10-11 mbar~1 bar
● Manual Actuator
● Bakeable to 150℃
● Welded Bellows Seal with SS 316
● Micrometer with 10um Resolution
● Z-motion scale in 1mm increment
● Top mounting flange: CF35, tapped hole
● Bottom mounting flange: CF63, clear hole
| Flange OD | XY Movement | Z Movement | A Compressed | A Extended | Weight（Kg) | Part Number | |
| mm | inch | mm | |||||
| 70 | 2.75 | ±12.5 | 75 | 165 | 240 | 10.2 | SXYZ63Z75 |
| 100 | 165 | 265 | 10.5 | SXYZ63Z100 | |||
| 150 | 165 | 315 | 10.9 | SXYZ63Z150 | |||