Product Overview

High-precision full-scale XYZ stage with the welded bellows provides X, Y and Z movements. This series adopts linear slider and high precision ball screw, which is strong and compact in structure.

With servo motor and grating ruler, sub-micron precision can be achieved, and the stage can be matched with high precision DPRF.
It is designed as a module with a wide range of optional configurations. Please contact for more information.

Specification

●  Working Pressure：10^-11mbar~1 bar

●  Bakeable to 120℃ (just bellow)

●  Welded Bellows Seal with SS 316

●  Clear Bore up to 102mm

●  Servo motor driver

●  linear slider and high precision ball screw

●  Optical Encoder

●  Resolution: 0.2μm

●  Top mounting flange: CF100, clear hole

●  Bottom mounting flange: CF150, clear hole

●  minimum flange to flange(compressed)distance is 410.5mm