Stage
- “High-precision stages are positional equipment that is ideal for atmospheric, high-vacuum and ultra-high-vacuum environments while providing both accuracy and durability.
- The core of vacuum is the proper selection of materials, plastics, lubricants, components, etc. with low outgasing, and the material is limited to aluminum stainless steel.
- It has developed a custom vacuum compatible solution for synchrotron radiation, semiconductor lithography and space development applications, providing oil-free lubrication in ultra-high vacuum as well as high-precision linear and angular encoders. It is divided into a position stage and a vacuum stage.”
SPECS
○ 포지션 스테이지 (Positioning Stage)
- 매뉴얼 X, XY 리니어 스테이지(Manual X,XY Linear Stages)- 매뉴얼 버티컬 리니어 스테이지(Manual Vertical Linear Stages)- 매뉴얼 로테이션 스테이지(Manual Rotation Stages)- 매뉴얼 스위블 스테이지[고니어미터] (Manual Swivel Stages[Goniometers])- 전동 로테이션 스테이지(Motorized Rotation Stages)- 전동 버티컬 리니어 스테이지(Motorized Vertical Linear Stages)- 전동 스위블 스테이지[고니어미터](Motorized Swivel Stages[Goniometers])- 전동 얼라인먼트 스테이션(Motorized Alignment Stations)- 전동 X, XY 리니어 스테이지(Motorized X,XY Linear Stages)- 진공 스테이지(Vacuum Compatible Stages) ○ 기타 시스템 - 도파관 얼라인먼트 시스템(Waveguide Alignment Systems)- 매뉴얼 얼라인먼트 스테이션(Manual Alignment Stations)- 스테이지용 모터 컨트롤러(Stage Motor Controller)- 스테이지용 홀더 및 기타부품(Holder & Accessories)- 방진테이블, 스페이서, 스테이지용 브라켓(Vibration Isolation Table, Spacer, Bracket)