Kohzu
- "High-precision stages are positional equipment that is ideal for atmospheric, high-vacuum and ultra-high-vacuum environments while providing both accuracy and durability.
- The core of vacuum is the proper selection of materials, plastics, lubricants, components, etc. with low outgasing, and the material is limited to aluminum stainless steel.
- It has developed a custom vacuum compatible solution for synchrotron radiation, semiconductor lithography and space development applications, providing oil-free lubrication in ultra-high vacuum as well as high-precision linear and angular encoders. It is divided into a position stage and a vacuum stage."
Materials & Vacuum Products
- SupremEX® is an aluminum-based carbide metal matrix composite (MMC) produced by sintering.
- SupremEX® is more economical than beryllium or AlBeMet®.
- Recently, SupremEX® has been applied as a core component in semiconductor and display fields.
Materials & Vacuum Products
- TOFLAS®-3000, an atomic spanning surface analysis equipment, applies the measurement principle of ion scattering spectroscopy (CAICISS) and uses atomic beams rather than ions in the incident probe. Element analysis and structural analysis are possible immediately during metal, semiconductor, insulator sample surface or thin film growth.
Materials & Vacuum Products
- The U-TIGHTTSEAL® is a metal gasket with a built-in elastic core (coil and spring).
- U-TIGHTTSEAL® is a metal material and exhibits rubber-like properties due to its excellent compression and restoration properties. The shape is a ring with a circular cross-section, and the structure has a closely wound elastic core at the center, consisting of one to two layers of sheath covering it. The outer sheath is made of flexible metal that is easy to handle, and for the second layer, the inner sheath is made of a relatively hard material.