Materials & Vacuum Products
- HELICOFLEX® Seal is used in an extreme environment such as cryogenic, high temperature, ultrahigh pressure and high vacuum, which is impossible in an existing seals, and has an excellent sealing force even when a flange is deformed by pressure and temperature change by the action of a Helical Spring contained in an O-ring. Among Metal Seals, HELICOFLEX® Seal has the best sealing power, vacuum, and sealing level along with Ultra-Flex Seal. In particular, it provides a solution to problems such as corrosion and oxidation caused by fluorine gas in the field of semiconductors and displays.
Beryllium
- Beryllium powder is sintered with HIP, CIP and VHP to supply high-purity beryllium products with good isotropy with a minimum beryllium content of 98.5 to 99.2%. It is used in various fields according to the product grade and it can be manufactured in various forms to meet the needs of customers.
Materials & Vacuum Products
- The Laser Molecular Beam Epitaxy System (MBE) is a PLD (Plused Laser Deposition) equipment that uses a high-power pulsed laser to melt sputtering targets during PVD.
- It enables atomic control of thickness during deposition of unit or multi-element thin films to manufacture ultra-thin films or super-lattice thin films and can manufacture thin films with the same composition ratio as raw materials which is used for high-quality thin films. It is largely classified into Compact type and Mobile Combi type.
Materials & Vacuum Products
- Fundamental unit of PASCAL Reflection High-Energy Electron Diffraction (RHEED) consists a compact size electron-gun with mounting via CF1.33" (ICF34) flange.
- The compact size e-gun brings easy mount to a vacuum chamber or easy maintenance.
- Reflection High-Energy Electron Diffraction (RHEED), a reflection high-energy electron diffraction equipment, consists of a CF 1.33"" flange mount and a small size electron gun.
- The compact electron gun enables easy maintenance and allows parallel operation of other optional devices under high pressure conditions or when observing scanning plane samples of the electron beam.
Kohzu
- The main rotation axis coincides with the surface plane of the 2nd crystal. Shift of the 1st crystal position with respect to the incident beam, which would be caused by simple rotation of the table around the main axis is compensated by vertical motion of the 1st crystal guided by the cam.
Materials & Vacuum Products
- We provide metal oxide semiconductors such as IGZO (InGaZnOx) which are used for TFT purposes and high-quality transparent conductive film materials (TCO) such as WIDE BAND GAP materials and RRAM materials.