EUV Systems
- Hollow Shaft Magnetic Coupled Rotary Feedthrough has a rotatable internal hollow shaft, and each drive terminates with a CF flange at the rear enabling services such as electric, fluid or an extra motion to be passed through the drive. The rotary feedthrough is designed to carry heavy load on the hollow shaft.
EUV Systems
- Linear Translator adopts lead screw structure to ensure the smooth operation of the upper flange, which make it more accurate and stable in the UHV environment. This series covers different flange size and travel length. Standard version comes with manual actuator and if you need motor actuator, please contact Fermi.
EUV Systems
- Based on Standard LTM series, Linear Translator with Port Aligner integrates an port aligner that allows the moving flange to be tilted ±3° for final alignment. It is typically used on beamlines to align diagnostics or for ion/sputter source alignment. Adjustment is actuated via three threaded support shafts. All flanges in the series are supplied with tapped bolt holes on the base flange as standard. Standard version comes with manual actuator and if you need motor driven, please contact Fermi.